Trace gas monitor/analyser
January 2006
Analytical Instrumentation & Environmental Monitoring
Horiba's GA-360E/F360E Series trace gas monitor/analysers provide accurate, continuous monitoring of trace amounts of impurities contained in gases such as N2, O2, He, Ar, H2, and air used in the semiconductor manufacturing process. Using a cross-modulation method, GA-360E/F360 Series units have no zero drift due to the simultaneous analysis of the zero gas and ordinary time comparison and offer long-term, stable measurement values. A 19" rack makes for easy system upgrade. GA-360E/F360 Series analysers are well suited for use at semiconductor gas production facilities.
The units are equipped with a maximum two-component function within the one-component analysis capability for CO, CO2, and CH4 and are capable of simultaneous digital display of the concentrations of two components. The units use a cross-modulation method and have no zero drift, thereby providing long-term, stable, continuous display values.
The need for optics adjustment is eliminated making maintenance easy. A self-monitoring function for the flow volume (pressure), chopper motor (electromagnetic valve), accidental fire warning (GA-360E), and electrical source warning systems alert users to any irregularities.
For more information contact Noel Bauchop, OEN Enterprises, 011 675 4447, [email protected], www.oenenterprises.co.za
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